Investigation on the composition of copper oxide films grown via rapid thermal oxidation
Abstract
Copper oxide films were fabricated via thermal oxidation of copper sheets in a water vapor-filled atmosphere. The phase transition of copper oxide in the 500-900 °C temperature range was investigated through X-ray diffractometry and Raman spectroscopy. X-ray diffractometry showed the crystallization of Cu2O phases as the temperature was increased. Raman spectroscopy further showed the presence of a layer of CuO on top of the Cu2O layer as the temperature was increased. The changes in the composition of copper oxide that occurred in the said temperature range has been successfully studied.