Fabrication of microbridge pattern on Bi₂Sr₂CaCu₂O_8+δ superconducting film using tabletop UV lamp source

Authors

Benjamin D. Villaflor ⋅ PH National Institute of Physics, University of the Philippines Diliman
Jan Isaac L. Bugante ⋅ PH National Institute of Physics, University of the Philippines Diliman
Roland V. Sarmago ⋅ PH National Institute of Physics, University of the Philippines Diliman

Abstract

An alternative approach is introduced in microfabrication on superconducting films. Instead of standard mask aligner, a tabletop UV money checker was used as light source in photolithography of photoresist on Bi-2212 film. A microbridge with width ∼30 micrometers was successfully fabricated using the process. The etched film however is uneven, and the edge of the pattern is not very steep. The microbridge is still superconducting after the process, with no significant changes on the transition temperature. This method is thus a possible alternative for microfabrication of superconducting device. However, the dimensions should not be less than 20 micrometers.

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Issue

2013: Proceedings of the 31st Samahang Pisika ng Pilipinas Physics Congress

Article ID

SPP2013-PB-14

Section

Poster Session PB

Published

2013-10-23

How to Cite

[1]

BD Villaflor, JIL Bugante, and RV Sarmago, Fabrication of microbridge pattern on Bi2Sr2CaCu2O8+δ superconducting film using tabletop UV lamp source, Proceedings of the Samahang Pisika ng Pilipinas 31, SPP2013-PB-14 (2013). URL: https://proceedings.spp-online.org/article/view/SPP2013-PB-14.