Fabrication and characterization of Indium Oxide heterojunction photodiodes on p-Silicon(111)

Authors

Renebeth Payod National Institute of Physics, University of the Philippines Diliman
Clairecynth Yu National Institute of Physics, University of the Philippines Diliman
Daniel Vasquez National Institute of Physics, University of the Philippines Diliman
Joseph Christopher Ragasa National Institute of Physics, University of the Philippines Diliman
Mae Agatha Tumanguil National Institute of Physics, University of the Philippines Diliman
Neil Irvin Cabello National Institute of Physics, University of the Philippines Diliman
Fritz Christian Awitan National Institute of Physics, University of the Philippines Diliman
Armando Somintac National Institute of Physics, University of the Philippines Diliman
Arnel Salvador National Institute of Physics, University of the Philippines Diliman

Abstract

Indium Oxide/p-Silicon (In₂O₃/p-Si) heterojunction photodiodes were successfully fabricated via standard photolithography and thermal oxidation
technique using a cost-effective etching-free route as compared to other conventional deposition and plasma etching methods. XRD spectra revealed
highly-oriented (111) growth similar to the substrate orientation. SEM images of the photodiodes showed the dominant surface morphology of the
formed In₂O₃. I-V curve obtained from the device resulted to a non-linear diode behavior with a turn-on voltage of approximately 0.8V under non-
illuminated conditions. A 0.5mA I-V shift from the reverse bias region of the illuminated device showed a probable photocurrent generation along the
wavefunction. Photocurrent spectroscopy and reponsivity measurements of the device resulted to similar characteristics with the commercially available
Si photodiodes.

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Issue

2012: Proceedings of the 30th Samahang Pisika ng Pilipinas Physics Congress

Article ID

SPP2012-6C-5

Section

Condensed Matter Physics

Published

2012-10-22

How to Cite

[1]

R Payod, C Yu, D Vasquez, JC Ragasa, MA Tumanguil, NI Cabello, FC Awitan, A Somintac, and A Salvador, Fabrication and characterization of Indium Oxide heterojunction photodiodes on p-Silicon(111), Proceedings of the Samahang Pisika ng Pilipinas 30, SPP2012-6C-5 (2012). URL: https://proceedings.spp-online.org/article/view/SPP2012-6C-5.