Fabrication of tunable optical transmission filters based on porous silicon
Abstract
Tunable optical transmission filters were synthesized from porous silicon by electrochemical etching in a lateral single chamber anodization cell. Filters at 6000Å, 7000Å, and 8000Å were fabricated by utilizing a distributed Bragg reflector structure with an inclusion of a destructively interfering spacer layer. Reflectance Spectroscopy verified minimum reflectance points of about 20% reflectance together with the uniformity of the sample. Photoluminescence spectroscopy showed energy of minimum absorbance at around 7250Å.