Determining the resistivity of aluminum-doped zinc oxide films through current-voltage measurements

Authors

Horace Andrew F. Husay ⋅ PH National Institute of Physics, University of the Philippines Diliman https://orcid.org/0000-0001-6032-0952
Jarzen Kobe Fidelson ⋅ PH National Institute of Physics, University of the Philippines Diliman
Hiroshi Hojo ⋅ PH National Institute of Physics, University of the Philippines Diliman
Joybelle Lopez ⋅ PH Materials Science and Engineering Program, University of the Philippines Diliman
Al-Khadeem Ahmad ⋅ PH National Institute of Physics, University of the Philippines Diliman
Debinya Buenafe ⋅ PH Materials Science and Engineering Program, University of the Philippines Diliman
Armando Somintac ⋅ PH National Institute of Physics, University of the Philippines Diliman

Abstract

We determined the resistivity of spray pyrolysis-deposited aluminum-doped zinc oxide (AZO) films through current-voltage measurements. AZO films with identical material properties and varying cross-sectional areas were grown using the spray pyrolysis deposition technique followed by post-deposition thermal annealing. The film thickness of the AZO film was measured through scanning electron microscopy, while changes in the structural composition were characterized through Raman spectroscopy. The electrical resistance of the AZO films was measured through current-voltage measurements in the two-terminal configuration. The resistivity of the grown AZO film was calculated by fitting the plot of the resistance versus the length/cross-sectional area with the formula for the resistance of an ohmic material. The results show that our grown AZO films have a calculated resistivity of 3.45 x 10³ Ω · cm for a film thickness of 440 nm.

Issue

2025: Proceedings of the 43rd Samahang Pisika ng Pilipinas Physics Conference

Article ID

SPP-2025-PA-30

Section

Poster Session PA (Photonics, Condensed Matter, Materials and Quantum Science)

Published

2025-06-23

How to Cite

[1]

HAF Husay, JK Fidelson, H Hojo, J Lopez, A-K Ahmad, D Buenafe, and A Somintac, Determining the resistivity of aluminum-doped zinc oxide films through current-voltage measurements, Proceedings of the Samahang Pisika ng Pilipinas 43, SPP-2025-PA-30 (2025). URL: https://proceedings.spp-online.org/article/view/SPP-2025-PA-30.