Determining the resistivity of aluminum-doped zinc oxide films through current-voltage measurements
Abstract
We determined the resistivity of spray pyrolysis-deposited aluminum-doped zinc oxide (AZO) films through current-voltage measurements. AZO films with identical material properties and varying cross-sectional areas were grown using the spray pyrolysis deposition technique followed by post-deposition thermal annealing. The film thickness of the AZO film was measured through scanning electron microscopy, while changes in the structural composition were characterized through Raman spectroscopy. The electrical resistance of the AZO films was measured through current-voltage measurements in the two-terminal configuration. The resistivity of the grown AZO film was calculated by fitting the plot of the resistance versus the length/cross-sectional area with the formula for the resistance of an ohmic material. The results show that our grown AZO films have a calculated resistivity of 3.45 x 103 Ω · cm for a film thickness of 440 nm.
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