Thermal sensing application of aluminum nitride thin film

Authors

Vernalyn Copa ⋅ PH Materials Science and Engineering Program, University of the Philippines Diliman
Anthony Tuico ⋅ PH Materials Science and Engineering Program, University of the Philippines Diliman
Erick John Carlo Solibet ⋅ PH National Institute of Physics, University of the Philippines Diliman
Elmer Estacio ⋅ PH National Institute of Physics, University of the Philippines Diliman
Arnel Salvador ⋅ PH National Institute of Physics, University of the Philippines Diliman
Armando Somintac ⋅ PH National Institute of Physics, University of the Philippines Diliman

Abstract

Aluminum nitride (AlN) thin film is fabricated into a serpentine-structured thermal sensor. The fabricated sensor has a working area of 40mm x 40mm, with a thickness of 592 nm for the AlN sensing element. The sensing application of the device was tested in the range of 30°C to 100°C. The obtained proportionality constant, β, was found to have a 60/K deviation in the entire characterization range. The device was found to have better sensitivity, at -1.43%/K, in the lowest change in temperature measurement. β-equation was used as calibration equation in this study.

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Issue

2016: Proceedings of the 34th Samahang Pisika ng Pilipinas Physics Conference

Article ID

SPP-2016-PB-07

Section

Poster Session PB

Published

2016-08-18

How to Cite

[1]

V Copa, A Tuico, EJC Solibet, E Estacio, A Salvador, and A Somintac, Thermal sensing application of aluminum nitride thin film, Proceedings of the Samahang Pisika ng Pilipinas 34, SPP-2016-PB-07 (2016). URL: https://proceedings.spp-online.org/article/view/SPP-2016-PB-07.