Thermal sensing application of aluminum nitride thin film

Authors

  • Vernalyn Copa Materials Science and Engineering Program, University of the Philippines Diliman
  • Anthony Tuico Materials Science and Engineering Program, University of the Philippines Diliman
  • Erick John Carlo Solibet National Institute of Physics, University of the Philippines Diliman
  • Elmer Estacio National Institute of Physics, University of the Philippines Diliman
  • Arnel Salvador National Institute of Physics, University of the Philippines Diliman
  • Armando Somintac National Institute of Physics, University of the Philippines Diliman

Abstract

Aluminum nitride (AlN) thin film is fabricated into a serpentine-structured thermal sensor. The fabricated sensor has a working area of 40mm x 40mm, with a thickness of 592 nm for the AlN sensing element. The sensing application of the device was tested in the range of 30°C to 100°C. The obtained proportionality constant, β, was found to have a 60/K deviation in the entire characterization range. The device was found to have better sensitivity, at -1.43%/K, in the lowest change in temperature measurement. β-equation was used as calibration equation in this study.

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Published

2016-08-18

Issue

2016: Proceedings of the 34th Samahang Pisika ng Pilipinas Physics Conference

Section

Poster Session PB

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Upon acceptance of their manuscript, the Authors further agree to grant SPP the non-exclusive, worldwide, and royalty-free rights to record, edit, copy, reproduce, publish, distribute, and use all or part of the manuscript for any purpose, in any media now existing or developed in the future, either individually or as part of a collection.
All other associated economic and moral rights as granted by the Intellectual Property Code of the Philippines are maintained by the Authors.

How to Cite

[1]
“Thermal sensing application of aluminum nitride thin film”, Proc. SPP, vol. 34, no. 1, p. SPP-2016-PB-07, Aug. 2016, Accessed: Mar. 28, 2026. [Online]. Available: https://proceedings.spp-online.org/article/view/SPP-2016-PB-07