Piezoresistive zinc oxide deposited via spray pyrolysis as a prototype stress sensor
Abstract
Zinc oxide films was deposited on aluminum and glass substrates via spray pyrolysis using precursor solution volumes of 25, 50 and 100 mL. XRD patterns confirmed that the synthesized film is a polycrystalline ZnO having a preferred orientation of of 100. UV-Vis spectroscopy showed the high transmittance of the films and allowed the estimation of their thicknesses. The piezoresistive property of the films were demonstrated via a fabricated three-point flexural test setup and the 50 mL sample exhibited the highest sensitivity to applied stress.