Characterization of a viscoelastic grating coated with Al via oblique angle deposition
Abstract
Polydimethylsiloxane (PDMS) was employed to fabricate an elastomeric grating. An aluminum thin film was deposited onto the grating using oblique angle deposition (OAD). The thin film layer enhanced grating reflectivity. Buckling of the metal film was reduced through the use of OAD. At normal incidence, the elastomeric grating demonstrated a maximum scanning capability of 1.240 at an applied strain of 2.69%.
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Published
2016-08-18
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Section
Optics and Photonics
How to Cite
[1]
“Characterization of a viscoelastic grating coated with Al via oblique angle deposition”, Proc. SPP, vol. 34, no. 1, pp. SPP–2016, Aug. 2016, Accessed: Apr. 06, 2026. [Online]. Available: https://proceedings.spp-online.org/article/view/SPP-2016-5A-02








