Oblique angle deposition of high transmitting MgF₂ multilayer films

Abstract

Magnesium fluoride was deposited on glass substrates using Oblique Angle Deposition (OAD) by resistive heating. Samples were prepared by a combination of OAD and normal incidence deposition, and one sample was prepared using normal incidence deposition. Electron microscopy of the samples revealed a columnar grain structure, while EDX analysis showed unbalanced stoichiometry for samples prepared without a pore closure layer (outer-layer with deposition angle of 0°). The transmission spectra of the samples were also obtained and it was found that by changing the deposition angle of the film, the transmission properties of the samples can be manipulated.