Raman spectra of ultra-thin diamond-like carbon films

Abstract

Ultra-thin diamond-like carbon films ≤30 Å on silicon substrate were investigated by Raman spectroscopy. Thick DLC films ~200 Å were used for comparison. Difficulty in analyzing the Raman spectrum appear as film thickness significantly decreases due to weak intensity and signal from the substrate. Results of ion beam sputtering and filtered cathodic arc deposition were compared.