Raman spectra of ultra-thin diamond-like carbon films

Authors

Hannah Rillera ⋅ PH National Institute of Physics, University of the Philippines Diliman
Roland V. Sarmago ⋅ PH National Institute of Physics, University of the Philippines Diliman

Abstract

Ultra-thin diamond-like carbon films ≤30 Å on silicon substrate were investigated by Raman spectroscopy. Thick DLC films ~200 Å were used for comparison. Difficulty in analyzing the Raman spectrum appear as film thickness significantly decreases due to weak intensity and signal from the substrate. Results of ion beam sputtering and filtered cathodic arc deposition were compared.

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Issue

2010: Proceedings of the 28th Samahang Pisika ng Pilipinas Physics Congress

Article ID

SPP-2010-PA-29

Section

Poster Session PA

Published

2010-10-25

How to Cite

[1]

H Rillera and RV Sarmago, Raman spectra of ultra-thin diamond-like carbon films, Proceedings of the Samahang Pisika ng Pilipinas 28, SPP-2010-PA-29 (2010). URL: https://proceedings.spp-online.org/article/view/SPP-2010-PA-29.