Raman spectra of ultra-thin diamond-like carbon films
Abstract
Ultra-thin diamond-like carbon films ≤30 Å on silicon substrate were investigated by Raman spectroscopy. Thick DLC films ~200 Å were used for comparison. Difficulty in analyzing the Raman spectrum appear as film thickness significantly decreases due to weak intensity and signal from the substrate. Results of ion beam sputtering and filtered cathodic arc deposition were compared.
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Strengthening physics research and education for a brighter tomorrow
25-27 October 2010, MERALCO Management and Leadership Development Center, Antipolo City