Fabrication of anatase titanium dioxide nanotubes on RF sputtered titanium thin films via anodization

Abstract

Titanium dioxide nanotubes were fabricated using anodization of RF sputtered titanium thin films on two different electrolytes namely, hydrofluoric acid(HF) and NH₄F in ethylene glycol. For each electrolyte, the morphology of the grown nanotubes was investigated as affected by the anodization time. The development of the nanotubes was observed using a Scanning Electron Microscope. It was observed that precipitate formation stops and the diameters of pores widen through increasing anodization time for HF and NH₄F in EG electrolytes, respectively. Characteristic Raman peaks for anatase TiO₂ nanotubes were obtained, through Raman spectroscopy, from both the samples grown in two different electrolytes.