Strain evaluation of GaAs/Alâ‚“Gaâ‚â‚‹â‚“As superlattice via reciprocal space mapping

Authors

  • Aleena Maria K. Laganapan ⋅ PH National Institute of Physics, University of the Philippines Diliman
  • Mae Agatha C. Tumanguil ⋅ PH National Institute of Physics, University of the Philippines Diliman
  • Armando A. Somintac ⋅ PH National Institute of Physics, University of the Philippines Diliman

Abstract

The goal is to present and demonstrate a method of characterizing GaAs-based superlattices by mapping a section of its reciprocal space. To do this, we employ a double-axis high resolution x-ray di_ractometer. We then obtain a series of ω/2 ω’ scans where the ω of each scan deviates from the Bragg condition by an angle δω=0.01á¤. We are able to obtain a reciprocal space map (RSM) for a 40-period GaAs/Alâ‚“Gaâ‚â‚‹â‚“As superlattice. Structural parameters and strain evaluation are also presented.

SPP 2010 Proceedings Cover

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Published

2010-10-25

Issue

2010: Proceedings of the 28th Samahang Pisika ng Pilipinas Physics Congress

Section

Materials Physics

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How to Cite

[1]
“Strain evaluation of GaAs/Alâ‚“Ga₁₋ₓAs superlattice via reciprocal space mapping”, Proc. SPP, vol. 28, no. 1, pp. SPP–2010, Oct. 2010, Accessed: Apr. 19, 2026. [Online]. Available: https://proceedings.spp-online.org/article/view/SPP-2010-3A-05