Strain evaluation of GaAs/AlₓGa₁₋ₓAs superlattice via reciprocal space mapping

Authors

Aleena Maria K. Laganapan National Institute of Physics, University of the Philippines Diliman
Mae Agatha C. Tumanguil National Institute of Physics, University of the Philippines Diliman
Armando A. Somintac National Institute of Physics, University of the Philippines Diliman

Abstract

The goal is to present and demonstrate a method of characterizing GaAs-based superlattices by mapping a section of its reciprocal space. To do this, we employ a double-axis high resolution x-ray di_ractometer. We then obtain a series of ω/2 ω’ scans where the ω of each scan deviates from the Bragg condition by an angle δω=0.01ᐤ. We are able to obtain a reciprocal space map (RSM) for a 40-period GaAs/AlₓGa₁₋ₓAs superlattice. Structural parameters and strain evaluation are also presented.

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Issue

2010: Proceedings of the 28th Samahang Pisika ng Pilipinas Physics Congress

Article ID

SPP-2010-3A-05

Section

Materials Physics

Published

2010-10-25

How to Cite

[1]

AMK Laganapan, MAC Tumanguil, and AA Somintac, Strain evaluation of GaAs/AlₓGa₁₋ₓAs superlattice via reciprocal space mapping, Proceedings of the Samahang Pisika ng Pilipinas 28, SPP-2010-3A-05 (2010). URL: https://proceedings.spp-online.org/article/view/SPP-2010-3A-05.