Strain evaluation of GaAs/AlₓGa₁₋ₓAs superlattice via reciprocal space mapping

Authors

Aleena Maria K. Laganapan ⋅ PH National Institute of Physics, University of the Philippines Diliman
Mae Agatha C. Tumanguil ⋅ PH National Institute of Physics, University of the Philippines Diliman
Armando A. Somintac ⋅ PH National Institute of Physics, University of the Philippines Diliman

Abstract

The goal is to present and demonstrate a method of characterizing GaAs-based superlattices by mapping a section of its reciprocal space. To do this, we employ a double-axis high resolution x-ray di_ractometer. We then obtain a series of ω/2 ω’ scans where the ω of each scan deviates from the Bragg condition by an angle δω=0.01ᐤ. We are able to obtain a reciprocal space map (RSM) for a 40-period GaAs/AlₓGa₁₋ₓAs superlattice. Structural parameters and strain evaluation are also presented.

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Issue

2010: Proceedings of the 28th Samahang Pisika ng Pilipinas Physics Congress

Article ID

SPP-2010-3A-05

Section

Materials Physics

Published

2010-10-25

How to Cite

[1]

AMK Laganapan, MAC Tumanguil, and AA Somintac, Strain evaluation of GaAs/AlₓGa₁₋ₓAs superlattice via reciprocal space mapping, Proceedings of the Samahang Pisika ng Pilipinas 28, SPP-2010-3A-05 (2010). URL: https://proceedings.spp-online.org/article/view/SPP-2010-3A-05.