Discharge characteristics of a Streaming Neutral Gas Injection Hollow Cathode
Abstract
The discharge characteristics of a Streaming Neutral Gas Injection Hollow Cathode was investigated. The current–voltage plots of gas discharges for different gas ratios of hydrogen (H2) and acetylene (C2H2) were obtained and compared with plots for a typical DC plasma source operating on similar electrode configuration and ambient pressure by utilizing a separate gas inlet. The SNGI’s capability to operate in glow discharge mode and arc discharge mode was demonstrated in relation to future work on plasma assisted deposition of carbonaceous films.