Characterization of n-In_xAl_1-xAs/In_yGa_1-yAs metamorphic high electron mobility transistors (MHEMTs) on GaAs

Authors

Jonathan D. Azares ⋅ PH National Institute of Physics, University of the Philippines Diliman
Elizabeth Ann P. Prieto ⋅ PH National Institute of Physics, University of the Philippines Diliman
Rafael B. Jaculbia ⋅ PH National Institute of Physics, University of the Philippines Diliman
John Silverio F. Saligbon ⋅ PH Department of Physical Sciences, University of the Philippines Baguio
Jasher John A. Ibañes ⋅ PH National Institute of Physics, University of the Philippines Diliman
Michael J. Defensor ⋅ PH National Institute of Physics, University of the Philippines Diliman
Armando Somintac ⋅ PH National Institute of Physics, University of the Philippines Diliman
Arnel A. Salvador ⋅ PH National Institute of Physics, University of the Philippines Diliman

Abstract

We report the characterization of the first attempt of an n-In_xAl_1-xAs/In_yGa_1-yAs metamorphic high electron mobility transistor (MHEMT) on GaAs substrate grown via Molecular Beam Epitaxy. We used an Indium graded InGaAs metamorphic buffer layer for strain relaxation. The Hall Effect measurements indicate sheet carrier densities of 5.3x10¹²cm^-2, 4.21x10¹²cm^-2, and 4.25x10¹²cm^-2 with associated mobilities of 1,834 cm²/Vs, 3,328 cm²/Vs, and 3,946 cm²/Vs at room temperature, 77K, and 10K respectively. Photoluminescence confirms the occurrence of the InGaAs channel layer in the sample. We attribute the low mobility to the low indium content of 12% in the InGaAs channel and graded buffer layers.

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Issue

2008: Proceedings of the 26th Samahang Pisika ng Pilipinas Physics Congress

Article ID

SPP-2008-PA-11

Section

Poster Session A (Materials, Optical, and Plasma Physics)

Published

2008-10-22

How to Cite

[1]

JD Azares, EAP Prieto, RB Jaculbia, JSF Saligbon, JJA Ibañes, MJ Defensor, A Somintac, and AA Salvador, Characterization of n-InxAl1-xAs/InyGa1-yAs metamorphic high electron mobility transistors (MHEMTs) on GaAs, Proceedings of the Samahang Pisika ng Pilipinas 26, SPP-2008-PA-11 (2008). URL: https://proceedings.spp-online.org/article/view/SPP-2008-PA-11.