Improved performance of MMIC micro-inductors via thick-metal fabrication

Authors

  • Ronel Christian Roca ⋅ PH National Institute of Physics, University of the Philippines Diliman
  • Maria Emma Villamin ⋅ PH National Institute of Physics, University of the Philippines Diliman
  • Fritz Christian Awitan ⋅ PH National Institute of Physics, University of the Philippines Diliman
  • Jonathan Azares ⋅ PH National Institute of Physics, University of the Philippines Diliman
  • Jennifer Anne Constantino ⋅ PH National Institute of Physics, University of the Philippines Diliman
  • Michael Defensor ⋅ PH National Institute of Physics, University of the Philippines Diliman
  • Armando Somintac ⋅ PH National Institute of Physics, University of the Philippines Diliman
  • Arnel Salvador ⋅ PH National Institute of Physics, University of the Philippines Diliman
  • Marc Rosales ⋅ PH Department of Electrical and Electronics Engineering, University of the Philippines Diliman

Abstract

Improvement in the high frequency performance of spiral inductors fabricated in the Condensed Matter Physics Laboratory (CMPL) as compared to previously reported results was observed. This is achieved through thicker gold contact metals deposited via electrochemical plating. The reduction of the resistances of the metal contacts resulted in the increase of the self resonant frequencies of the devices.

 

 

SPP 2008 Proceedings Cover

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Published

2008-10-22

Issue

2008: Proceedings of the 26th Samahang Pisika ng Pilipinas Physics Congress

Section

Materials Physics

Copyright Information

© 2008 Ronel Christian Roca, Maria Emma Villamin, Fritz Christian Awitan, Jonathan Azares, Jennifer Anne Constantino, Michael Defensor, Armando Somintac, Arnel Salvador, Marc Rosales
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How to Cite

[1]
RC Roca, ME Villamin, FC Awitan, J Azares, JA Constantino, M Defensor, A Somintac, A Salvador, and M Rosales, Improved performance of MMIC micro-inductors via thick-metal fabrication, in Proceedings of the 26th Samahang Pisika ng Pilipinas Physics Congress (Philippines, 2008), SPP-2008-3A-05. URL: https://proceedings.spp-online.org/article/view/SPP-2008-3A-05
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