Improved performance of MMIC micro-inductors via thick-metal fabrication

Authors

Ronel Christian Roca ⋅ PH National Institute of Physics, University of the Philippines Diliman
Maria Emma Villamin ⋅ PH National Institute of Physics, University of the Philippines Diliman
Fritz Christian Awitan ⋅ PH National Institute of Physics, University of the Philippines Diliman
Jonathan Azares ⋅ PH National Institute of Physics, University of the Philippines Diliman
Jennifer Anne Constantino ⋅ PH National Institute of Physics, University of the Philippines Diliman
Michael Defensor ⋅ PH National Institute of Physics, University of the Philippines Diliman
Armando Somintac ⋅ PH National Institute of Physics, University of the Philippines Diliman
Arnel Salvador ⋅ PH National Institute of Physics, University of the Philippines Diliman
Marc Rosales ⋅ PH Department of Electrical and Electronics Engineering, University of the Philippines Diliman

Abstract

Improvement in the high frequency performance of spiral inductors fabricated in the Condensed Matter Physics Laboratory (CMPL) as compared to previously reported results was observed. This is achieved through thicker gold contact metals deposited via electrochemical plating. The reduction of the resistances of the metal contacts resulted in the increase of the self resonant frequencies of the devices.

Downloads

Issue

2008: Proceedings of the 26th Samahang Pisika ng Pilipinas Physics Congress

Article ID

SPP-2008-3A-05

Section

Materials Physics

Published

2008-10-22

How to Cite

[1]

RC Roca, ME Villamin, FC Awitan, J Azares, JA Constantino, M Defensor, A Somintac, A Salvador, and M Rosales, Improved performance of MMIC micro-inductors via thick-metal fabrication, Proceedings of the Samahang Pisika ng Pilipinas 26, SPP-2008-3A-05 (2008). URL: https://proceedings.spp-online.org/article/view/SPP-2008-3A-05.