Production of nanodot structure in silicon (100) substrate by low energy reactive ion bombardment

Authors

  • Adonis Flores National Institute of Physics, University of the Philippines Diliman and Department of Physics, University of San Carlos
  • Giovanni Malapit National Institute of Physics, University of the Philippines Diliman and Department of Physical Sciences, University of the Philippines Baguio
  • Regine Loberternos National Institute of Physics, University of the Philippines Diliman
  • Gene Blantocas National Institute of Physics, University of the Philippines Diliman
  • Henry Ramos National Institute of Physics, University of the Philippines Diliman

Abstract

We present result on the formation of nanodot structures on a silicon substrate by reactive ion bombardment. Reactive ions and radicals are produced using a low energy gas discharge ion source (GDIS) plasma device. Sizes of the dots formed are in the range [30-300] nm. These are comparable to the results produced via argon ion sputtering.

SPP 2008 Proceedings Cover

Downloads

Published

2008-10-22

Issue

2008: Proceedings of the 26th Samahang Pisika ng Pilipinas Physics Congress

Section

Materials Physics

License

By submitting their manuscript to the Samahang Pisika ng Pilipinas (SPP) for consideration, the Authors warrant that their work is original, does not infringe on existing copyrights, and is not under active consideration for publication elsewhere.
Upon acceptance of their manuscript, the Authors further agree to grant SPP the non-exclusive, worldwide, and royalty-free rights to record, edit, copy, reproduce, publish, distribute, and use all or part of the manuscript for any purpose, in any media now existing or developed in the future, either individually or as part of a collection.
All other associated economic and moral rights as granted by the Intellectual Property Code of the Philippines are maintained by the Authors.

How to Cite

[1]
“Production of nanodot structure in silicon (100) substrate by low energy reactive ion bombardment”, Proc. SPP, vol. 26, no. 1, pp. SPP–2008, Oct. 2008, Accessed: Mar. 29, 2026. [Online]. Available: https://proceedings.spp-online.org/article/view/SPP-2008-2A-03