Investigating TiN formation through mapping of sheet plasma using Langmuir probe

Authors

  • Michelle Villamayor National Institute of Physics, University of the Philippines Diliman
  • Micielle N. Capili National Institute of Physics, University of the Philippines Diliman
  • Virginia Noguera National Institute of Physics, University of the Philippines Diliman
  • Henry J. Ramos National Institute of Physics, University of the Philippines Diliman

Abstract

Langmuir probes with straight and L-shaped tips were used in weakly ionized Ar and N2-Ar sheet plasma to determine electron density and temperature at localized positions. Results show that electron distribution and temperature are not uniformly distributed through out the sheet. The experimental data can be used in mapping the sheet plasma to locate optimum deposition.

SPP 2007 Proceedings Cover

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Published

2007-10-24

Issue

2007: Proceedings of the 25th Samahang Pisika ng Pilipinas Physics Congress

Section

Poster Session PB

License

By submitting their manuscript to the Samahang Pisika ng Pilipinas (SPP) for consideration, the Authors warrant that their work is original, does not infringe on existing copyrights, and is not under active consideration for publication elsewhere.
Upon acceptance of their manuscript, the Authors further agree to grant SPP the non-exclusive, worldwide, and royalty-free rights to record, edit, copy, reproduce, publish, distribute, and use all or part of the manuscript for any purpose, in any media now existing or developed in the future, either individually or as part of a collection.
All other associated economic and moral rights as granted by the Intellectual Property Code of the Philippines are maintained by the Authors.

How to Cite

[1]
“Investigating TiN formation through mapping of sheet plasma using Langmuir probe”, Proc. SPP, vol. 25, no. 1, p. SPP-2007-PB-17, Oct. 2007, Accessed: Mar. 26, 2026. [Online]. Available: https://proceedings.spp-online.org/article/view/SPP-2007-PB-17