Investigating TiN formation through mapping of sheet plasma using Langmuir probe
Abstract
Langmuir probes with straight and L-shaped tips were used in weakly ionized Ar and N2-Ar sheet plasma to determine electron density and temperature at localized positions. Results show that electron distribution and temperature are not uniformly distributed through out the sheet. The experimental data can be used in mapping the sheet plasma to locate optimum deposition.
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Issue
Physics: Key to understanding nature
Liknayan: Susi sa pagtuklas ng kalikasan
24-26 October 2007, University of the Philippines Los BaƱos, Laguna