Investigating TiN formation through mapping of sheet plasma using Langmuir probe

Authors

  • Michelle Villamayor ⋅ PH National Institute of Physics, University of the Philippines Diliman
  • Micielle N. Capili ⋅ PH National Institute of Physics, University of the Philippines Diliman
  • Virginia Noguera ⋅ PH National Institute of Physics, University of the Philippines Diliman
  • Henry J. Ramos ⋅ PH National Institute of Physics, University of the Philippines Diliman

Abstract

Langmuir probes with straight and L-shaped tips were used in weakly ionized Ar and N2-Ar sheet plasma to determine electron density and temperature at localized positions. Results show that electron distribution and temperature are not uniformly distributed through out the sheet. The experimental data can be used in mapping the sheet plasma to locate optimum deposition.

SPP 2007 Proceedings Cover

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Published

2007-10-24

Issue

2007: Proceedings of the 25th Samahang Pisika ng Pilipinas Physics Congress

Section

Poster Session PB

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How to Cite

[1]
“Investigating TiN formation through mapping of sheet plasma using Langmuir probe”, Proc. SPP, vol. 25, no. 1, p. SPP-2007-PB-17, Oct. 2007, Accessed: May 02, 2026. [Online]. Available: https://proceedings.spp-online.org/article/view/SPP-2007-PB-17