Investigating TiN formation through mapping of sheet plasma using Langmuir probe

Authors

Michelle Villamayor ⋅ PH National Institute of Physics, University of the Philippines Diliman
Micielle N. Capili ⋅ PH National Institute of Physics, University of the Philippines Diliman
Virginia Noguera ⋅ PH National Institute of Physics, University of the Philippines Diliman
Henry J. Ramos ⋅ PH National Institute of Physics, University of the Philippines Diliman

Abstract

Langmuir probes with straight and L-shaped tips were used in weakly ionized Ar and N₂-Ar sheet plasma to determine electron density and temperature at localized positions. Results show that electron distribution and temperature are not uniformly distributed through out the sheet. The experimental data can be used in mapping the sheet plasma to locate optimum deposition.

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Issue

2007: Proceedings of the 25th Samahang Pisika ng Pilipinas Physics Congress

Article ID

SPP-2007-PB-17

Section

Poster Session PB

Published

2007-10-24

How to Cite

[1]

M Villamayor, MN Capili, V Noguera, and HJ Ramos, Investigating TiN formation through mapping of sheet plasma using Langmuir probe, Proceedings of the Samahang Pisika ng Pilipinas 25, SPP-2007-PB-17 (2007). URL: https://proceedings.spp-online.org/article/view/SPP-2007-PB-17.