Electron temperature measurement of an argon microwave discharge using spectroscopic analysis of 4p transition levels

Authors

Marko E. Arciaga ⋅ PH National Institute of Physics, University of the Philippines Diliman
April M. Ulano ⋅ PH National Institute of Physics, University of the Philippines Diliman
Roy B. Tumlos ⋅ PH Department of Physical Sciences and Mathematics, University of the Philippines Manila
Henry J. Ramos ⋅ PH National Institute of Physics, University of the Philippines Diliman

Abstract

This study demonstrates a spectroscopic method for determining the electron temperature, T_e, of an argon discharge produced by a low-pressure microwave plasma device using the 4p transition levels. We calculated T_e by the method developed and compared the results with those obtained from the Langmuir probe measurements. At the periphery of the plasma, the results obtained from spectroscopic analysis agreed well with those obtained from probe measurements by less than 10% difference. The values from the two methods differ much from each other at regions near the center of the plasma.

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Issue

2006: Proceedings of the 24th Samahang Pisika ng Pilipinas National Physics Congress

Article ID

SPP-2006-PA-15

Section

Poster Session PA

Published

2006-10-25

How to Cite

[1]

ME Arciaga, AM Ulano, RB Tumlos, and HJ Ramos, Electron temperature measurement of an argon microwave discharge using spectroscopic analysis of 4p transition levels, Proceedings of the Samahang Pisika ng Pilipinas 24, SPP-2006-PA-15 (2006). URL: https://proceedings.spp-online.org/article/view/SPP-2006-PA-15.