Investigations on the effects of Ti target position and bias potential to the synthesis of TiN in a magnetized sheet plasma source

Authors

  • Virginia R. Noguera National Institute of Physics, University of the Philippines Diliman
  • Earl Vincent B. Lagsa Materials Science and Engineering Program, University of the Philippines Diliman
  • Melissa Camacho National Institute of Physics, University of the Philippines Diliman
  • Henry J. Ramos National Institute of Physics, University of the Philippines Diliman

Abstract

In a previous study, TiN is successfully synthesized both on stainless steel samples and on actual industrial tools with the Ti disk target (9.15 cm in diameter) placed at the anode of the extraction region. The positive potential on the disk limits the sputtering yield and gives inconsistent deposition rate and film quality as the nitriding process on the surface of the Ti target could dominate the sputtering process. Here, sputtering is primarily due to electron bombardment. In this study, it is therefore aimed to increase the sputtering yield with positive argon ions. A Ti disk is placed at the production and at the extraction regions of the SPNIS and biased with negative potential (−250 V, −400 V and −900 V). The disk is water-cooled to eliminate the effect of heating on the sputtering rate. The stainless steel substrates are placed at the extraction region parallel to the sheet plasma and at 2.3 cm from the sheet's core. Because of the geometry and magnetic confinement configuration of the source, no TiN film is produced on the SS samples when the target is located at the production region. However, TiN film that exhibits good adhesion and of good optical properties is deposited on the glass tubing of the target holder. Infrared reflection of up to 50% is obtained. TiN films are successfully produced on the SS samples when the target is placed at the extraction region. The XRD patterns of the synthesized films showed TiN (200), TiN (311) and Ti2N (220) phases.

SPP 2006 Proceedings Cover

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Published

2006-10-25

Issue

2006: Proceedings of the 24th Samahang Pisika ng Pilipinas National Physics Congress

Section

Poster Session PA

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All other associated economic and moral rights as granted by the Intellectual Property Code of the Philippines are maintained by the Authors.

How to Cite

[1]
“Investigations on the effects of Ti target position and bias potential to the synthesis of TiN in a magnetized sheet plasma source”, Proc. SPP, vol. 24, no. 1, p. SPP-2006-PA-14, Oct. 2006, Accessed: Mar. 26, 2026. [Online]. Available: https://proceedings.spp-online.org/article/view/SPP-2006-PA-14