Studies of microwave power system for plasma generation

Abstract

A microwave power system (MPS), using a commercial magnetron from a domestic microwave oven as its microwave source, is assembled and characterized for the future construction of microwave-induced plasma devices. Measurements of the output power of the MPS are obtained using calorimetry with water as system loads. Power measurements show that a relatively stable maximum power of 320 W can be delivered to a 2-l water load continuously for 2 min at the optimum settings of the MPS. A power calibration curve is also generated from the power measurements and the sampled voltage signals from the rf diodes located at the system loads. The spectral content of the voltage signals is also determined through discrete Fourier transform methods. And the observed frequency spectrum indicates a peak frequency of 2.47 GHz and lowamplitude side frequencies of 2.44 and 2.53 GHz, harmonics, and beats.