Design and implementation of a low-cost thermoreflectance microscope

Authors

Serafin Delica National Institute of Physics, University of the Philippines Diliman
Godofredo Bautista National Institute of Physics, University of the Philippines Diliman
Carlo Blanca National Institute of Physics, University of the Philippines Diliman
Bernardino Buenaobra National Institute of Physics, University of the Philippines Diliman
Caesar Saloma National Institute of Physics, University of the Philippines Diliman

Abstract

We design a low cost and fast scanning thermal imaging system and demonstrate its capability in the investigation of temperature variation in an active integrated circuit (IC). The design is able to map the variation of temperature via changes in reflectivity, and to localize heating or cooling spots within the IC using multi-wavelength reflectance measurement at 10.9 nm effective spectral resolution.

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Issue

2005: Proceedings of the 23rd Samahang Pisika ng Pilipinas Physics Congress

Article ID

SPP-2005-3D-02

Section

Instrumentation and Optics

Published

2005-10-26

How to Cite

[1]

S Delica, G Bautista, C Blanca, B Buenaobra, and C Saloma, Design and implementation of a low-cost thermoreflectance microscope, Proceedings of the Samahang Pisika ng Pilipinas 23, SPP-2005-3D-02 (2005). URL: https://proceedings.spp-online.org/article/view/SPP-2005-3D-02.