Design and implementation of a low-cost thermoreflectance microscope

Authors

  • Serafin Delica ⋅ PH National Institute of Physics, University of the Philippines Diliman
  • Godofredo Bautista ⋅ PH National Institute of Physics, University of the Philippines Diliman
  • Carlo Blanca ⋅ PH National Institute of Physics, University of the Philippines Diliman
  • Bernardino Buenaobra ⋅ PH National Institute of Physics, University of the Philippines Diliman
  • Caesar Saloma ⋅ PH National Institute of Physics, University of the Philippines Diliman

Abstract

We design a low cost and fast scanning thermal imaging system and demonstrate its capability in the investigation of temperature variation in an active integrated circuit (IC). The design is able to map the variation of temperature via changes in reflectivity, and to localize heating or cooling spots within the IC using multi-wavelength reflectance measurement at 10.9 nm effective spectral resolution.

SPP 2005 Proceedings Cover

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Published

2005-10-26

Issue

2005: Proceedings of the 23rd Samahang Pisika ng Pilipinas Physics Congress

Section

Instrumentation and Optics

Copyright Information

© 2005 Serafin Delica, Godofredo Bautista, Carlo Blanca, Bernardino Buenaobra, Caesar Saloma
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How to Cite

[1]
S Delica, G Bautista, C Blanca, B Buenaobra, and C Saloma, Design and implementation of a low-cost thermoreflectance microscope, in Proceedings of the 23rd Samahang Pisika ng Pilipinas Physics Congress (Philippines, 2005), SPP-2005-3D-02. URL: https://proceedings.spp-online.org/article/view/SPP-2005-3D-02
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