Measurement of silicon dioxide thickness using reflectance spectrometer
Abstract
A reflectance spectrometer was modified to measure the reflectance of silicon dioxide thin film at different angles of incidence. Using Snell's Law and thin film thickness equation, the thickness of SiO2 film was determined from the reflectance of the sample. The measured thickness was consistent with the SiO2 Thickness Color Chart but with improved resolution.
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Creating essential bridges uniting physics, society and industry
22-25 October 2003, University of San Carlos, Cebu City