Displacement measurements at diffraction-limited resolution using optical-feedback laser diode Michelson interferometer
Abstract
Direction-sensitive displacement measurements at diffraction-limited spatial resolution is demonstrated with an interferometric optical-feedback laser diode confocal imaging system. Magnitude (in the order of wavelength) and direction of line-of-sight displacements of reflecting samples are detected within the depth of field. Comparison between theory and actual instrument performance is presented.
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