Sputtering yield dependence on projectile energy and projectile-target combinations

Authors

  • Luis Ma. Bo-ot ⋅ PH National Institute of Physics, University of the Philippines Diliman
  • Henry Ramos ⋅ PH National Institute of Physics, University of the Philippines Diliman

Abstract

The keyword in this paper is improvement of formulae presently used to analytically quantify sputtering yields. The revision follows the following outline:

  1. Replacement of the Thomas-Fermi nuclear stopping cross section SnTF(ε) with the one based on the Kr-C potential SnKrC(ε).
  2. Use of an analytic expression for the fit parameter Q based on Sigmund's formula.
  3. Use the following best fit for αs in the form
    αs = [0.15 + 0.05(M2/M1)]/[1 + 0.05(M2/M1)1.6].
SPP 1995 Proceedings Cover

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Published

1995-10-21

Issue

1995: Proceedings of the 13th National Physics Congress of the Samahang Pisika ng Pilipinas

Section

Plasma Physics and Liquid Crystals

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How to Cite

[1]
“Sputtering yield dependence on projectile energy and projectile-target combinations”, Proc. SPP, vol. 13, no. 1, p. SPP-1995-PL-03, Oct. 1995, Accessed: Apr. 15, 2026. [Online]. Available: https://proceedings.spp-online.org/article/view/SPP-1995-PL-03