Sputtering yield dependence on projectile energy and projectile-target combinations

Authors

Luis Ma. Bo-ot ⋅ PH National Institute of Physics, University of the Philippines Diliman
Henry Ramos ⋅ PH National Institute of Physics, University of the Philippines Diliman

Abstract

The keyword in this paper is improvement of formulae presently used to analytically quantify sputtering yields. The revision follows the following outline:

Replacement of the Thomas-Fermi nuclear stopping cross section S_n^TF(ε) with the one based on the Kr-C potential S_n^KrC(ε).
Use of an analytic expression for the fit parameter Q based on Sigmund's formula.
Use the following best fit for α_s in the form
α_s= [0.15 + 0.05(M₂/M₁)]/[1 + 0.05(M₂/M₁)^1.6].

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Issue

1995: Proceedings of the 13th National Physics Congress of the Samahang Pisika ng Pilipinas

Article ID

SPP-1995-PL-03

Section

Plasma Physics and Liquid Crystals

Published

1995-10-21

How to Cite

[1]

LM Bo-ot and H Ramos, Sputtering yield dependence on projectile energy and projectile-target combinations, Proceedings of the Samahang Pisika ng Pilipinas 13, SPP-1995-PL-03 (1995). URL: https://proceedings.spp-online.org/article/view/SPP-1995-PL-03.