Innovative vacuum technology

Authors

  • Klaus-Guenter Wagner ⋅ DE Leybold AG, Cologne, Germany

Abstract

Global quality standards and environment protection together with advanced process technology made vacuum technology to one of themost important technologies for today's and future life.
This paper gives a short survey on vacuum technology in modern applications: Thin Film, Superconductor, Laser, Semiconductor, Air-conditioning and Automobile.

SPP 1994 Proceedings Cover

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Published

1994-10-15

Issue

1994: Proceedings of the 12th National Physics Congress of the Samahang Pisika ng Pilipinas

Section

Plasma Physics and Liquid Crystals

License

Copyright License Agreement for Full Articles

How to Cite

[1]
“Innovative vacuum technology”, Proc. SPP, vol. 12, no. 1, p. SPP-1994-PL-01, Oct. 1994, Accessed: May 07, 2026. [Online]. Available: https://proceedings.spp-online.org/article/view/SPP-1994-PL-01