Innovative vacuum technology

Authors

Klaus-Guenter Wagner Leybold AG, Cologne, Germany

Abstract

Global quality standards and environment protection together with advanced process technology made vacuum technology to one of themost important technologies for today's and future life.
This paper gives a short survey on vacuum technology in modern applications: Thin Film, Superconductor, Laser, Semiconductor, Air-conditioning and Automobile.

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Issue

1994: Proceedings of the 12th National Physics Congress of the Samahang Pisika ng Pilipinas

Article ID

SPP-1994-PL-01

Section

Plasma Physics and Liquid Crystals

Published

1994-10-15

How to Cite

[1]

K-G Wagner, Innovative vacuum technology, Proceedings of the Samahang Pisika ng Pilipinas 12, SPP-1994-PL-01 (1994). URL: https://proceedings.spp-online.org/article/view/SPP-1994-PL-01.