A mass spectrometer system for analyzing ions
Abstract
A mass spectrometer system is designed to extract and analyze hydrogen ions from a volume plasma hydrogen ion source. A 180° magnetic deflection-type spectrometer is coupled to the multicusp negative ion device at the Institute of Plasma Physics, Nagoya University. The ions are detected by means of an instrumentation array connected to the mass analyzer. Hydrogen plasma is produced from a low pressure gas (~7 x 10-4 Torr) by an arc discharge (50 V, 4 A) of a single tungsten filament. The sensitivity of the mass spectrometer system is seen from the results obtained for hydrogen ions and some impurities.
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