An optical-fibre-based thin film thickness monitor

Authors

Neil Raymund Y. Caranto Department of Applied Physics, Victoria University of Technology, Australia
Senyemmo Charles Kaddu Department of Applied Physics, Victoria University of Technology, Australia
Jakub Sazjman Department of Applied Physics, Victoria University of Technology, Australia
Michael M. Murphy Department of Applied Physics, Victoria University of Technology, Australia
Stephen F. Collins Department of Applied Physics, Victoria University of Technology, Australia
David J. Booth Department of Applied Physics, Victoria University of Technology, Australia

Abstract

A simple thin film thickness monitor involving optical fibre components is described. The film was deposited onto the cleaved end of an optical fibre using vacuum techniques. The thickness was determined by monitoring the return power via a 2x2 directional coupler arrangement. This optical monitor was used to calibrate a conventional quartz crystal monitor.

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Issue

1992: Proceedings of the International Conference on Physics and Technology in the 1990's

Article ID

ICPT-1992-IP-03

Section

Instrumentation Physics

Published

1992-12-01

How to Cite

[1]

NRY Caranto, SC Kaddu, J Sazjman, MM Murphy, SF Collins, and DJ Booth, An optical-fibre-based thin film thickness monitor, Proceedings of the Samahang Pisika ng Pilipinas 10, ICPT-1992-IP-03 (1992). URL: https://proceedings.spp-online.org/article/view/ICPT-1992-IP-03.