An optical-fibre-based thin film thickness monitor

Authors

  • Neil Raymund Y. Caranto ⋅ AU Department of Applied Physics, Victoria University of Technology, Australia
  • Senyemmo Charles Kaddu ⋅ AU Department of Applied Physics, Victoria University of Technology, Australia
  • Jakub Sazjman ⋅ AU Department of Applied Physics, Victoria University of Technology, Australia
  • Michael M. Murphy ⋅ AU Department of Applied Physics, Victoria University of Technology, Australia
  • Stephen F. Collins ⋅ AU Department of Applied Physics, Victoria University of Technology, Australia
  • David J. Booth ⋅ AU Department of Applied Physics, Victoria University of Technology, Australia

Abstract

A simple thin film thickness monitor involving optical fibre components is described. The film was deposited onto the cleaved end of an optical fibre using vacuum techniques. The thickness was determined by monitoring the return power via a 2x2 directional coupler arrangement. This optical monitor was used to calibrate a conventional quartz crystal monitor.

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Published

1992-12-01

Issue

1992: Proceedings of the International Conference on Physics and Technology in the 1990's

Section

Instrumentation Physics

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How to Cite

[1]
“An optical-fibre-based thin film thickness monitor”, Proc. SPP, vol. 10, no. 2, p. ICPT-1992-IP-03, Dec. 1992, Accessed: Apr. 16, 2026. [Online]. Available: https://proceedings.spp-online.org/article/view/ICPT-1992-IP-03