Modified configuration of TiN film deposited on stainless steel substrate using magnetized sheet plasma source

Authors

Ar Jay C. Sura ⋅ PH National Institute of Physics, University of the Philippines Diliman
Hamdy Abdel Moneim Abdou ⋅ PH National Institute of Physics, University of the Philippines Diliman
Erwin Abergas ⋅ PH Asian Semiconductor and Electronics Technology, Department of Science and Technology
Marcedon S. Fernandez ⋅ PH National Institute of Physics, University of the Philippines Diliman
Henry J. Ramos ⋅ PH National Institute of Physics, University of the Philippines Diliman

Abstract

Deposition of TiN film on washer stainless steel type 304 was done using magnetized sheet plasma negative ion source. A modified configuration of substrate, target and magnets was used. XRD results showed that coated substrate exhibited TiN(200), Ti₂N(220), TiN(220) and TiN(311) XRD peaks. Cross-sectional SEM results showed the TiN film thickness of 78.05 m and deposition rate of 0.65m/min. Surface energy analysis of the substrates was also done using contact angle measurement. Results showed that TiN deposit increased the hydrophobicity and decreased the surface energy of the stainless steel.

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Issue

2015: Proceedings of the 33rd Samahang Pisika ng Pilipinas Physics Congress

Article ID

SPP-2015-PB-30

Section

Poster Session PB

Published

2015-06-03

How to Cite

[1]

AJC Sura, HAM Abdou, E Abergas, MS Fernandez, and HJ Ramos, Modified configuration of TiN film deposited on stainless steel substrate using magnetized sheet plasma source, Proceedings of the Samahang Pisika ng Pilipinas 33, SPP-2015-PB-30 (2015). URL: https://proceedings.spp-online.org/article/view/1236.