Modified configuration of TiN film deposited on stainless steel substrate using magnetized sheet plasma source

Authors

  • Ar Jay C. Sura National Institute of Physics, University of the Philippines Diliman
  • Hamdy Abdel Moneim Abdou National Institute of Physics, University of the Philippines Diliman
  • Erwin Abergas Asian Semiconductor and Electronics Technology, Department of Science and Technology
  • Marcedon S. Fernandez National Institute of Physics, University of the Philippines Diliman
  • Henry J. Ramos National Institute of Physics, University of the Philippines Diliman

Abstract

Deposition of TiN film on washer stainless steel type 304 was done using magnetized sheet plasma negative ion source. A modified configuration of substrate, target and magnets was used. XRD results showed that coated substrate exhibited TiN(200), Ti2N(220), TiN(220) and TiN(311) XRD peaks. Cross-sectional SEM results showed the TiN film thickness of 78.05 m and deposition rate of 0.65m/min. Surface energy analysis of the substrates was also done using contact angle measurement. Results showed that TiN deposit increased the hydrophobicity and decreased the surface energy of the stainless steel.

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Published

2015-06-03

Issue

2015: Proceedings of the 33rd Samahang Pisika ng Pilipinas Physics Congress

Section

Poster Session PB

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Upon acceptance of their manuscript, the Authors further agree to grant SPP the non-exclusive, worldwide, and royalty-free rights to record, edit, copy, reproduce, publish, distribute, and use all or part of the manuscript for any purpose, in any media now existing or developed in the future, either individually or as part of a collection.
All other associated economic and moral rights as granted by the Intellectual Property Code of the Philippines are maintained by the Authors.

How to Cite

[1]
“Modified configuration of TiN film deposited on stainless steel substrate using magnetized sheet plasma source”, Proc. SPP, vol. 33, no. 1, p. SPP-2015-PB-30, Jun. 2015, Accessed: Mar. 24, 2026. [Online]. Available: https://proceedings.spp-online.org/article/view/1236