Determination of thickness and index of refraction of ZT (ZrO₂+Ta₂O₅) thin film using Swanepoel method

Authors

Rufino A. Badiola ⋅ PH Department of Physics, University of San Carlos
Oliver Semblante ⋅ PH Department of Physics, University of San Carlos
Claude Ceniza ⋅ PH Department of Physics, University of San Carlos
Regine Loberternos ⋅ PH Department of Physics, University of San Carlos
Roland Balat ⋅ PH Koshin Philippines Corporation
Raymund Sarmiento ⋅ PH Department of Physics, University of San Carlos

Abstract

Thin films of ZT (ZrO₂+Ta₂O₅) have wide applications from antireflection (AR) coatings to optical filters. The index of refraction as a function of wavelength is important in the design of antireflection coatings. From the transmission spectrum of the thin film and by using Swanepoel method, the index of refraction as a function of wavelength and thickness were obtained. The transmission spectrum of ZT (ZrO₂+Ta₂O₅) thin film was measured using Red Tide USB650 spectrometer and U-4100 spectrophotometer. Calculated thicknesses of thin film were (7.1 ± 0.2) x 10² nm and (7.36 ± 0.08) x 10² nm for Red Tide USB650 spectrometer and U-4100 spectrophotometer, respectively. Results have fractional error from 0.01-0.03 and are in good agreement with those reported in literature.

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Issue

2015: Proceedings of the 33rd Samahang Pisika ng Pilipinas Physics Congress

Article ID

SPP-2015-5A-03

Section

Photonics and Terahertz, Optics and Signal Processing

Published

2015-06-03

How to Cite

[1]

RA Badiola, O Semblante, C Ceniza, R Loberternos, R Balat, and R Sarmiento, Determination of thickness and index of refraction of ZT (ZrO2+Ta2O5) thin film using Swanepoel method, Proceedings of the Samahang Pisika ng Pilipinas 33, SPP-2015-5A-03 (2015). URL: https://proceedings.spp-online.org/article/view/1135.