Determination of thickness and index of refraction of ZT (ZrO₂+Ta₂O₅) thin film using Swanepoel method

Authors

Rufino A. Badiola Department of Physics, University of San Carlos
Oliver Semblante Department of Physics, University of San Carlos
Claude Ceniza Department of Physics, University of San Carlos
Regine Loberternos Department of Physics, University of San Carlos
Roland Balat Koshin Philippines Corporation
Raymund Sarmiento Department of Physics, University of San Carlos

Abstract

Thin films of ZT (ZrO₂+Ta₂O₅) have wide applications from antireflection (AR) coatings to optical filters. The index of refraction as a function of wavelength is important in the design of antireflection coatings. From the transmission spectrum of the thin film and by using Swanepoel method, the index of refraction as a function of wavelength and thickness were obtained. The transmission spectrum of ZT (ZrO₂+Ta₂O₅) thin film was measured using Red Tide USB650 spectrometer and U-4100 spectrophotometer. Calculated thicknesses of thin film were (7.1 ± 0.2) x 10² nm and (7.36 ± 0.08) x 10² nm for Red Tide USB650 spectrometer and U-4100 spectrophotometer, respectively. Results have fractional error from 0.01-0.03 and are in good agreement with those reported in literature.

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Issue

2015: Proceedings of the 33rd Samahang Pisika ng Pilipinas Physics Congress

Article ID

SPP-2015-5A-03

Section

Photonics and Terahertz, Optics and Signal Processing

Published

2015-06-03

How to Cite

[1]

RA Badiola, O Semblante, C Ceniza, R Loberternos, R Balat, and R Sarmiento, Determination of thickness and index of refraction of ZT (ZrO2+Ta2O5) thin film using Swanepoel method, Proceedings of the Samahang Pisika ng Pilipinas 33, SPP-2015-5A-03 (2015). URL: https://proceedings.spp-online.org/article/view/1135.