Nb-Al-C: A compound belonging to MAX phase deposited on titanium substrate via magnetron sputtering

Authors

Redentor Natividad College of Science, Polytechnic University of the Philippines
Rommel Paulo Viloan National Institute of Physics, University of the Philippines Diliman
Michelle Marie Villamayor National Institute of Physics, University of the Philippines Diliman
Henry Ramos National Institute of Physics, University of the Philippines Diliman
Hamdi Muhyuddin Barra Physics Department, Mindanao State University

Abstract

The study provides an information about depositing Nb-Al-C, a thin film that belongs to MAX Phases, on a titanium substrate using magnetized sheet plasma negative ion source. The sputtering was done by employing graphite as source of carbon instead of reactive gas such as methane. Different parameters were considered in this study that includes varying the sputtering time and target bias. X-ray diffractometry results showed the effective synthesis of MAX phase as the peaks at 22°, 36°, and 44° were exhibited by the deposited substrates. Fourier transform infrared spectroscopy showed changes in the chemical bonds after deposition.

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Issue

2013: Proceedings of the 31st Samahang Pisika ng Pilipinas Physics Congress

Article ID

SPP2013-PB-32

Section

Poster Session PB

Published

2013-10-23

How to Cite

[1]

R Natividad, RP Viloan, MM Villamayor, H Ramos, and HM Barra, Nb-Al-C: A compound belonging to MAX phase deposited on titanium substrate via magnetron sputtering, Proceedings of the Samahang Pisika ng Pilipinas 31, SPP2013-PB-32 (2013). URL: https://proceedings.spp-online.org/article/view/SPP2013-PB-32.