Fabrication and characterization of multilayered porous polycrystalline Silicon
Abstract
Fabrication and characterization of porous polycrystalline silicon were presented. The effects of varying supplied anodic current and number of stacking periodic layers during the electrochemical etching of the samples were investigated. By varying the anodic currents, the calculated refractive indices from the reflectivity results were 1.334, 1.168 and 1.093 with porosities of 0.802, 0.885 and 0.931, respectively. On the other hand, varying the number of layers stacking pairs yielded refractive indices of 1.280, 1.294 and 1.289 with porosities of 0.827, 0.820 and 0.823, respectively. With these values, it can be concluded that changing the supplied anodic current changes the samples properties; and varying the number of layers does not.