Optical analysis of tin oxide thin films synthesized by reactive magnetron sputtering

Authors

Venice Mascarinas ⋅ PH Materials Science and Engineering Program, University of the Philippines Diliman
Aubrey Faith Mella ⋅ PH Materials Science and Engineering Program, University of the Philippines Diliman
Julius Andrew Nuñez ⋅ PH Materials Science and Engineering Program, University of the Philippines Diliman
Armando Somintac ⋅ PH National Institute of Physics, University of the Philippines Diliman

Abstract

Tin oxide (SnO₂) was synthesized on glass substrates via reactive sputtering using a compact planar magnetron. The deposition was done for 15 minutes at varying target bias/current and O₂:Ar gas ratio. One sample was deposited on Si(100) and it was verified through x-ray diffraction that SnO₂–(101) and (310) were formed. UV-vis spectroscopy results and calculations showed that increasing the target current and O₂:Ar ratio correspondingly increases the film thickness. Results also showed higher transmittance and absorbance in the visible and UV spectrum, respectively. Transmittance and absorbance images shone with visible and UV light source are also presented supporting the spectroscopy results.

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Issue

2013: Proceedings of the 31st Samahang Pisika ng Pilipinas Physics Congress

Article ID

SPP2013-PA-14

Section

Poster Session PA

Published

2013-10-23

How to Cite

[1]

V Mascarinas, AF Mella, JA Nuñez, and A Somintac, Optical analysis of tin oxide thin films synthesized by reactive magnetron sputtering, Proceedings of the Samahang Pisika ng Pilipinas 31, SPP2013-PA-14 (2013). URL: https://proceedings.spp-online.org/article/view/SPP2013-PA-14.