Implementation of converging ion beam to prepare functional thin film materials

Authors

  • Mamiko Sasao Office for R&D promotion, Doshisha University
  • Takahiro Kenmotsu Faculty of Life and Medical Sciences, Doshisha University
  • Naoki Miyamoto Graduate School of Science and Engineering, Doshisha University
  • Masaki Nishiura National Institute for Fusion Science
  • Henry Ramos National Institute of Physics, University of the Philippines Diliman
  • Motoi Wada Graduate School of Science and Engineering, Doshisha University

Abstract

Possible improvements in plasma based syntheses of functional thin film materials for various applications are possible based upon the technology transfer of convergent ion beam developed for nuclear fusion plasma research. The intense ion beam current with the current density exceeding 600 mA/cm2 and the energy lower than 20 keV provide an ideal particle source to sputter out materials necessary for thin film syntheses. Comparison with the sputtering yield data suggests operation of the source with Ne and Ar can create enough Ti flux based upon beam sputter deposition.

Proceedings SPP 2013 Cover

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Published

2013-10-23

Issue

2013: Proceedings of the 31st Samahang Pisika ng Pilipinas Physics Congress

Section

Plasma Physics

License

By submitting their manuscript to the Samahang Pisika ng Pilipinas (SPP) for consideration, the Authors warrant that their work is original, does not infringe on existing copyrights, and is not under active consideration for publication elsewhere.
Upon acceptance of their manuscript, the Authors further agree to grant SPP the non-exclusive, worldwide, and royalty-free rights to record, edit, copy, reproduce, publish, distribute, and use all or part of the manuscript for any purpose, in any media now existing or developed in the future, either individually or as part of a collection.
All other associated economic and moral rights as granted by the Intellectual Property Code of the Philippines are maintained by the Authors.

How to Cite

[1]
“Implementation of converging ion beam to prepare functional thin film materials”, Proc. SPP, vol. 31, no. 1, pp. SPP2013–5C, Oct. 2013, Accessed: Mar. 27, 2026. [Online]. Available: https://proceedings.spp-online.org/article/view/SPP2013-5C-1