Fabrication and characterization of RF sputtered aluminum nitride for thermal sensing applications

Authors

  • Anthony Tuico Materials Science and Engineering Program, University of the Philippines Diliman
  • Nestor Bareza National Institute of Physics, University of the Philippines Diliman
  • Dyan Buan National Institute of Physics, University of the Philippines Diliman
  • Armando Somintac National Institute of Physics, University of the Philippines Diliman

Abstract

This paper demonstrates the fabrication of a thermal sensor from a patterned AlN film with varying length. The AlN film was deposited on a Si (100) substrate via RF magnetron sputtering. An a axis oriented crystallinity defined by the AlN (10-10) peak was determined by X-ray diffraction measurements. From the electrical characterization at varying temperatures, a resistance-temperature curve following the Steinhart-Hart equation and a resistivity-temperature plot were obtained. Finally, the Steinhart-Hart curve was tested and showed a minimum deviation of 5.33% from the generated fit equation.

Proceedings SPP 2013 Cover

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Published

2013-10-23

Issue

2013: Proceedings of the 31st Samahang Pisika ng Pilipinas Physics Congress

Section

Materials Science

License

By submitting their manuscript to the Samahang Pisika ng Pilipinas (SPP) for consideration, the Authors warrant that their work is original, does not infringe on existing copyrights, and is not under active consideration for publication elsewhere.
Upon acceptance of their manuscript, the Authors further agree to grant SPP the non-exclusive, worldwide, and royalty-free rights to record, edit, copy, reproduce, publish, distribute, and use all or part of the manuscript for any purpose, in any media now existing or developed in the future, either individually or as part of a collection.
All other associated economic and moral rights as granted by the Intellectual Property Code of the Philippines are maintained by the Authors.

How to Cite

[1]
“Fabrication and characterization of RF sputtered aluminum nitride for thermal sensing applications”, Proc. SPP, vol. 31, no. 1, pp. SPP2013–4A, Oct. 2013, Accessed: Mar. 28, 2026. [Online]. Available: https://proceedings.spp-online.org/article/view/SPP2013-4A-2