Fabrication of Aluminum Nitride thin film as thermistor and micro heater

Authors

Vernalyn Copa ⋅ PH Materials Science and Engineering Program and National Institute of Physics, University of the Philippines Diliman
Nestor Bareza ⋅ PH National Institute of Physics, University of the Philippines Diliman
Anthony Tuico ⋅ PH Materials Science and Engineering Program, University of the Philippines Diliman
Rizzie Kimberly Raguindin ⋅ PH Material Science and Engineering Program, University of the Philippines Diliman
Rachelle Anne Geline Ureta ⋅ PH Material Science and Engineering Program, University of the Philippines Diliman
Armando Somintac ⋅ PH National Institute of Physics, University of the Philippines Diliman

Abstract

Thermistor and micro heater was designed and fabricated in a single device using Aluminum Nitride (AlN). To test the capability of the thermistor, the resistance of the device was obtained at selected temperatures ranging from 26 0C to 160 0C.
The relationship between the temperature and resistance shows great agreement to the Steinhart-Hart equation for thermistors. Subsequently, the micro heater was enabled to produce the same temperature range by applying voltage difference
across the device. A linear relationship was acquired between power dissipation and temperature. AlN was successfully demonstrated to function as micro heater and micro sensor.

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Issue

2013: Proceedings of the 31st Samahang Pisika ng Pilipinas Physics Congress

Article ID

SPP2013-3A-2

Section

Materials Science

Published

2013-10-23

How to Cite

[1]

V Copa, N Bareza, A Tuico, RK Raguindin, RAG Ureta, and A Somintac, Fabrication of Aluminum Nitride thin film as thermistor and micro heater, Proceedings of the Samahang Pisika ng Pilipinas 31, SPP2013-3A-2 (2013). URL: https://proceedings.spp-online.org/article/view/SPP2013-3A-2.