Fabrication of Aluminum Nitride thin film as thermistor and micro heater

Authors

  • Vernalyn Copa Materials Science and Engineering Program and National Institute of Physics, University of the Philippines Diliman
  • Nestor Bareza National Institute of Physics, University of the Philippines Diliman
  • Anthony Tuico Materials Science and Engineering Program, University of the Philippines Diliman
  • Rizzie Kimberly Raguindin Material Science and Engineering Program, University of the Philippines Diliman
  • Rachelle Anne Geline Ureta Material Science and Engineering Program, University of the Philippines Diliman
  • Armando Somintac National Institute of Physics, University of the Philippines Diliman

Abstract

Thermistor and micro heater was designed and fabricated in a single device using Aluminum Nitride (AlN). To test the capability of the thermistor, the resistance of the device was obtained at selected temperatures ranging from 26 0C to 160 0C.
The relationship between the temperature and resistance shows great agreement to the Steinhart-Hart equation for thermistors. Subsequently, the micro heater was enabled to produce the same temperature range by applying voltage difference
across the device. A linear relationship was acquired between power dissipation and temperature. AlN was successfully demonstrated to function as micro heater and micro sensor.

Proceedings SPP 2013 Cover

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Published

2013-10-23

Issue

2013: Proceedings of the 31st Samahang Pisika ng Pilipinas Physics Congress

Section

Materials Science

License

By submitting their manuscript to the Samahang Pisika ng Pilipinas (SPP) for consideration, the Authors warrant that their work is original, does not infringe on existing copyrights, and is not under active consideration for publication elsewhere.
Upon acceptance of their manuscript, the Authors further agree to grant SPP the non-exclusive, worldwide, and royalty-free rights to record, edit, copy, reproduce, publish, distribute, and use all or part of the manuscript for any purpose, in any media now existing or developed in the future, either individually or as part of a collection.
All other associated economic and moral rights as granted by the Intellectual Property Code of the Philippines are maintained by the Authors.

How to Cite

[1]
“Fabrication of Aluminum Nitride thin film as thermistor and micro heater”, Proc. SPP, vol. 31, no. 1, pp. SPP2013–3A, Oct. 2013, Accessed: Mar. 24, 2026. [Online]. Available: https://proceedings.spp-online.org/article/view/SPP2013-3A-2