Electrical and optical properties of fluorine-doped tin oxide deposited via intermittent nebulized spray pyrolysis
Abstract
Fluorine-doped tin oxide films with preferred orientation (200) were successfully deposited on glass substrates via intermittent nebulized spray pyrolysis. The effect of dopant concentration and working temperature on the optical transmittance and film resistance was investigated. In this study, the optimum condition was obtained using 20 mol % fluorine doping at 400 ̊C
working temperature. The optimized deposited film has 83% visible transmittance and 0.103 kΩ film resistance.