Analysis of charged particle density distribution in a low energy ion beam by a fluid model

Abstract

A set of equations to calculate ion and electron density distributions in an ion beam flowing channel has been formulated. It combines two components of ion fluid and one neutral fluid with the electron background under a plasma condition. As the model requires spatial distribution of plasma parameter, an experimental setup has been assembled with the movable array of Faraday cups realizing 1.5 mm positioning accuracy. The setup has a position manipulation system that can measure a three dimensional distribution of ion current density.