Effect of dopant concentration and deposition time on the properties of fluorine-doped tin oxide (FTO) film deposited via spray pyrolysis

Authors

Jeremiah Chan ⋅ PH Department of Mining, Metallurgical, and Materials Engineering, University of the Philippines Diliman
Florencio De los Reyes ⋅ PH Department of Mining, Metallurgical, and Materials Engineering, University of the Philippines Diliman
Clairecynth Yu ⋅ PH National Institute of Physics, University of the Philippines Diliman
Lance Go ⋅ PH Department of Chemistry, Ateneo de Manila University
Armando Somintac ⋅ PH National Institute of Physics, University of the Philippines Diliman

Abstract

Fluorine-doped tin oxide (FTO) films with the preferred (110) orientation have been successfully fabricated on glass via spray pyrolysis. Dopant concentration has been found to affect the sheet resistance of the FTO film significantly, where the optimum condition was obtained using 20% fluorine deposited at 500 0C for 1 minute with sheet resistance of 37.37 Ω/sq and transmittance of 88.7%. Increasing the deposition time to 3 minutes further decreased the sheet resistance to 30 Ω/sq. On the other hand, % transmittance has generally increased to 93.7% for 5 minutes deposition time.

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Issue

2012: Proceedings of the 30th Samahang Pisika ng Pilipinas Physics Congress

Article ID

SPP2012-PB-21

Section

Poster Session PB

Published

2012-10-22

How to Cite

[1]

J Chan, F De los Reyes, C Yu, L Go, and A Somintac, Effect of dopant concentration and deposition time on the properties of fluorine-doped tin oxide (FTO) film deposited via spray pyrolysis, Proceedings of the Samahang Pisika ng Pilipinas 30, SPP2012-PB-21 (2012). URL: https://proceedings.spp-online.org/article/view/SPP2012-PB-21.