Fabrication and characterization of zinc oxide thin films through spray pyrolysis technique

Authors

Jefferson Abrenica ⋅ PH National Institute of Physics, University of the Philippines Diliman
Annaliza Amo ⋅ PH National Institute of Physics, University of the Philippines Diliman
Heinritz Miguel ⋅ PH National Institute of Physics, University of the Philippines Diliman
Armando Somintac ⋅ PH National Institute of Physics, University of the Philippines Diliman
Arnel Salvador ⋅ PH National Institute of Physics, University of the Philippines Diliman

Abstract

Zinc Oxide (ZnO) thin films were deposited on P-type silicon (100) substrates using spray pyrolysis technique with varying substrate temperature and deposition time. X-ray diffraction (XRD) results showed that the crystallinity changes with substrate temperature. It also confirm that the film deposited at 300 0C has a hexagonal wurtzite structure with preferential orientation along (002) plane. The Scanning Electron Microscopy (SEM) images revealed that film has a continuous and dense structure and that varying the substrate temperature and the deposition time changes the surface morphology and thickness respectively.

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Issue

2012: Proceedings of the 30th Samahang Pisika ng Pilipinas Physics Congress

Article ID

SPP2012-PB-12

Section

Poster Session PB

Published

2012-10-22

How to Cite

[1]

J Abrenica, A Amo, H Miguel, A Somintac, and A Salvador, Fabrication and characterization of zinc oxide thin films through spray pyrolysis technique, Proceedings of the Samahang Pisika ng Pilipinas 30, SPP2012-PB-12 (2012). URL: https://proceedings.spp-online.org/article/view/SPP2012-PB-12.