Fabrication and characterization of zinc oxide thin films through spray pyrolysis technique

Authors

  • Jefferson Abrenica National Institute of Physics, University of the Philippines Diliman
  • Annaliza Amo National Institute of Physics, University of the Philippines Diliman
  • Heinritz Miguel National Institute of Physics, University of the Philippines Diliman
  • Armando Somintac National Institute of Physics, University of the Philippines Diliman
  • Arnel Salvador National Institute of Physics, University of the Philippines Diliman

Abstract

Zinc Oxide (ZnO) thin films were deposited on P-type silicon (100) substrates using spray pyrolysis technique with varying substrate temperature and deposition time. X-ray diffraction (XRD) results showed that the crystallinity changes with substrate temperature. It also confirm that the film deposited at 300 0C has a hexagonal wurtzite structure with preferential orientation along (002) plane. The Scanning Electron Microscopy (SEM) images revealed that film has a continuous and dense structure and that varying the substrate temperature and the deposition time changes the surface morphology and thickness respectively.

SPP 2012 Conference Proceedings cover

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Published

2012-10-22

Issue

2012: Proceedings of the 30th Samahang Pisika ng Pilipinas Physics Congress

Section

Poster Session PB

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All other associated economic and moral rights as granted by the Intellectual Property Code of the Philippines are maintained by the Authors.

How to Cite

[1]
“Fabrication and characterization of zinc oxide thin films through spray pyrolysis technique”, Proc. SPP, vol. 30, no. 1, p. SPP2012-PB-12, Oct. 2012, Accessed: Mar. 24, 2026. [Online]. Available: https://proceedings.spp-online.org/article/view/SPP2012-PB-12