Fabrication and characterization of zinc oxide thin films through spray pyrolysis technique
Abstract
Zinc Oxide (ZnO) thin films were deposited on P-type silicon (100) substrates using spray pyrolysis technique with varying substrate temperature and deposition time. X-ray diffraction (XRD) results showed that the crystallinity changes with substrate temperature. It also confirm that the film deposited at 300 0C has a hexagonal wurtzite structure with preferential orientation along (002) plane. The Scanning Electron Microscopy (SEM) images revealed that film has a continuous and dense structure and that varying the substrate temperature and the deposition time changes the surface morphology and thickness respectively.