Fabrication of AlN/Air-gap distributed Bragg reflectors from wet etching of sacrificial Aluminum layers

Authors

Jonathan Ray Abat National Institute of Physics, University of the Philippines Diliman
Nemesio Mangila National Institute of Physics, University of the Philippines Diliman
Arnel Salvador National Institute of Physics, University of the Philippines Diliman
Armando Somintac National Institute of Physics, University of the Philippines Diliman

Abstract

AlN/air-gap distributed Bragg reflectors were fabricated using selective wet etch to remove the sacrificial Al layers. AlN/Al superlattice was prepared on a Si substrate via reactive radio frequency magnetron sputtering. Scan- ning electron microscopy was also performed to determine the AlN and Al thickness layers. The AlN/Al superlattice was annealed to improved the crystallinity of AlN layers and it was characterized using x-ray diffraction. Crystalized AlN (002) was confirmed from the x-ray rocking curve. Finally, we performed reflectivity measurements of the fabricated AlN/air-gap DBRs and it was recorded to be approximately 47% at the peak reflectivity.

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Issue

2012: Proceedings of the 30th Samahang Pisika ng Pilipinas Physics Congress

Article ID

SPP2012-PB-1

Section

Poster Session PB

Published

2012-10-22

How to Cite

[1]

JR Abat, N Mangila, A Salvador, and A Somintac, Fabrication of AlN/Air-gap distributed Bragg reflectors from wet etching of sacrificial Aluminum layers, Proceedings of the Samahang Pisika ng Pilipinas 30, SPP2012-PB-1 (2012). URL: https://proceedings.spp-online.org/article/view/SPP2012-PB-1.