Fabrication of AlN/Air-gap distributed Bragg reflectors from wet etching of sacrificial Aluminum layers

Authors

Jonathan Ray Abat ⋅ PH National Institute of Physics, University of the Philippines Diliman
Nemesio Mangila ⋅ PH National Institute of Physics, University of the Philippines Diliman
Arnel Salvador ⋅ PH National Institute of Physics, University of the Philippines Diliman
Armando Somintac ⋅ PH National Institute of Physics, University of the Philippines Diliman

Abstract

AlN/air-gap distributed Bragg reflectors were fabricated using selective wet etch to remove the sacrificial Al layers. AlN/Al superlattice was prepared on a Si substrate via reactive radio frequency magnetron sputtering. Scan- ning electron microscopy was also performed to determine the AlN and Al thickness layers. The AlN/Al superlattice was annealed to improved the crystallinity of AlN layers and it was characterized using x-ray diffraction. Crystalized AlN (002) was confirmed from the x-ray rocking curve. Finally, we performed reflectivity measurements of the fabricated AlN/air-gap DBRs and it was recorded to be approximately 47% at the peak reflectivity.

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Issue

2012: Proceedings of the 30th Samahang Pisika ng Pilipinas Physics Congress

Article ID

SPP2012-PB-1

Section

Poster Session PB

Published

2012-10-22

How to Cite

[1]

JR Abat, N Mangila, A Salvador, and A Somintac, Fabrication of AlN/Air-gap distributed Bragg reflectors from wet etching of sacrificial Aluminum layers, Proceedings of the Samahang Pisika ng Pilipinas 30, SPP2012-PB-1 (2012). URL: https://proceedings.spp-online.org/article/view/SPP2012-PB-1.