Simulation of the experimental electric potential of Einzel lens and kinetic energy of gold ion to focus the ion beam in plasma sputter-type negative ion source

Authors

  • Hannah Shamina Cosiñero ⋅ PH National Institute of Physics, University of the Philippines Diliman
  • Aiko Love del Rosario ⋅ PH National Institute of Physics, University of the Philippines Diliman
  • Christian Lorenz Mahinay ⋅ PH National Institute of Physics, University of the Philippines Diliman
  • Meryll Angelica Viernes ⋅ PH National Institute of Physics, University of the Philippines Diliman

Abstract

This paper discusses the value of experimental electric potential of the inner electrode of the einzel lens for a given kinetic energy of a gold ion to focus the ion beam in a plasma sputter-type negative ion source by simulation using the CST Particle Studio. The simulation qualitatively showed that using 200eV to 700eV of kinetic energy, the ion beam is more focused given a potential of 50V. At a kinetic energy of 100eV, the beam is best focused when the einzel lens is applied with a potential 100V.

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Published

2012-10-22

How to Cite

[1]
“Simulation of the experimental electric potential of Einzel lens and kinetic energy of gold ion to focus the ion beam in plasma sputter-type negative ion source”, Proc. SPP, vol. 30, no. 1, p. SPP2012-PA-24, Oct. 2012, Accessed: Apr. 16, 2026. [Online]. Available: https://proceedings.spp-online.org/article/view/SPP2012-PA-24