Simulation of the experimental electric potential of Einzel lens and kinetic energy of gold ion to focus the ion beam in plasma sputter-type negative ion source
Abstract
This paper discusses the value of experimental electric potential of the inner electrode of the einzel lens for a given kinetic energy of a gold ion to focus the ion beam in a plasma sputter-type negative ion source by simulation using the CST Particle Studio. The simulation qualitatively showed that using 200eV to 700eV of kinetic energy, the ion beam is more focused given a potential of 50V. At a kinetic energy of 100eV, the beam is best focused when the einzel lens is applied with a potential 100V.