Fabrication and characterization of vertically-oriented silicon nanowires synthesized via silver-assisted chemical etching

Authors

  • Neil Irvin Cabello ⋅ PH National Institute of Physics, University of the Philippines Diliman
  • Joseph Christopher Ragasa ⋅ PH National Institute of Physics, University of the Philippines Diliman
  • Mae Agatha Tumanguil ⋅ PH National Institute of Physics, University of the Philippines Diliman
  • Raymond Condes ⋅ PH National Institute of Physics, University of the Philippines Diliman
  • Maria Herminia Balgos ⋅ PH National Institute of Physics, University of the Philippines Diliman
  • Rafael Jaculbia ⋅ PH National Institute of Physics, University of the Philippines Diliman
  • Jessica Pauline Afalla ⋅ PH National Institute of Physics, University of the Philippines Diliman
  • Kaye Ann de las Alas ⋅ PH National Institute of Physics, University of the Philippines Diliman
  • Arnel Salvador ⋅ PH National Institute of Physics, University of the Philippines Diliman
  • Armando Somintac ⋅ PH National Institute of Physics, University of the Philippines Diliman

Abstract

Dense arrays of long and vertically-oriented silicon nanowires (SiNWs) were fabricated from p-type (100) silicon chips using both one-step and two-step silver-assisted chemical etching. Scanning electron microscope images of the samples confirmed the formation of nanowires. X-ray diffractometry and micro-Raman spectroscopy showed that the resulting SiNWs retained the crystal quality of the parent wafer. Certain differences between the samples fabricated using these two methods were noted.

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Published

2012-10-22

How to Cite

[1]
“Fabrication and characterization of vertically-oriented silicon nanowires synthesized via silver-assisted chemical etching”, Proc. SPP, vol. 30, no. 1, pp. SPP2012–6C, Oct. 2012, Accessed: Apr. 16, 2026. [Online]. Available: https://proceedings.spp-online.org/article/view/SPP2012-6C-3