Fabrication and characterization of vertically-oriented silicon nanowires synthesized via silver-assisted chemical etching

Authors

Neil Irvin Cabello ⋅ PH National Institute of Physics, University of the Philippines Diliman
Joseph Christopher Ragasa ⋅ PH National Institute of Physics, University of the Philippines Diliman
Mae Agatha Tumanguil ⋅ PH National Institute of Physics, University of the Philippines Diliman
Raymond Condes ⋅ PH National Institute of Physics, University of the Philippines Diliman
Maria Herminia Balgos ⋅ PH National Institute of Physics, University of the Philippines Diliman
Rafael Jaculbia ⋅ PH National Institute of Physics, University of the Philippines Diliman
Jessica Pauline Afalla ⋅ PH National Institute of Physics, University of the Philippines Diliman
Kaye Ann de las Alas ⋅ PH National Institute of Physics, University of the Philippines Diliman
Arnel Salvador ⋅ PH National Institute of Physics, University of the Philippines Diliman
Armando Somintac ⋅ PH National Institute of Physics, University of the Philippines Diliman

Abstract

Dense arrays of long and vertically-oriented silicon nanowires (SiNWs) were fabricated from p-type (100) silicon chips using both one-step and two-step silver-assisted chemical etching. Scanning electron microscope images of the samples confirmed the formation of nanowires. X-ray diffractometry and micro-Raman spectroscopy showed that the resulting SiNWs retained the crystal quality of the parent wafer. Certain differences between the samples fabricated using these two methods were noted.

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Issue

2012: Proceedings of the 30th Samahang Pisika ng Pilipinas Physics Congress

Article ID

SPP2012-6C-3

Section

Condensed Matter Physics

Published

2012-10-22

How to Cite

[1]

NI Cabello, JC Ragasa, MA Tumanguil, R Condes, MH Balgos, R Jaculbia, JP Afalla, KA de las Alas, A Salvador, and A Somintac, Fabrication and characterization of vertically-oriented silicon nanowires synthesized via silver-assisted chemical etching, Proceedings of the Samahang Pisika ng Pilipinas 30, SPP2012-6C-3 (2012). URL: https://proceedings.spp-online.org/article/view/SPP2012-6C-3.