Fabrication and characterization of vertically-oriented silicon nanowires synthesized via silver-assisted chemical etching

Authors

Neil Irvin Cabello National Institute of Physics, University of the Philippines Diliman
Joseph Christopher Ragasa National Institute of Physics, University of the Philippines Diliman
Mae Agatha Tumanguil National Institute of Physics, University of the Philippines Diliman
Raymond Condes National Institute of Physics, University of the Philippines Diliman
Maria Herminia Balgos National Institute of Physics, University of the Philippines Diliman
Rafael Jaculbia National Institute of Physics, University of the Philippines Diliman
Jessica Pauline Afalla National Institute of Physics, University of the Philippines Diliman
Kaye Ann de las Alas National Institute of Physics, University of the Philippines Diliman
Arnel Salvador National Institute of Physics, University of the Philippines Diliman
Armando Somintac National Institute of Physics, University of the Philippines Diliman

Abstract

Dense arrays of long and vertically-oriented silicon nanowires (SiNWs) were fabricated from p-type (100) silicon chips using both one-step and two-step silver-assisted chemical etching. Scanning electron microscope images of the samples confirmed the formation of nanowires. X-ray diffractometry and micro-Raman spectroscopy showed that the resulting SiNWs retained the crystal quality of the parent wafer. Certain differences between the samples fabricated using these two methods were noted.

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Issue

2012: Proceedings of the 30th Samahang Pisika ng Pilipinas Physics Congress

Article ID

SPP2012-6C-3

Section

Condensed Matter Physics

Published

2012-10-22

How to Cite

[1]

NI Cabello, JC Ragasa, MA Tumanguil, R Condes, MH Balgos, R Jaculbia, JP Afalla, KA de las Alas, A Salvador, and A Somintac, Fabrication and characterization of vertically-oriented silicon nanowires synthesized via silver-assisted chemical etching, Proceedings of the Samahang Pisika ng Pilipinas 30, SPP2012-6C-3 (2012). URL: https://proceedings.spp-online.org/article/view/SPP2012-6C-3.