Plasma excitation by RF power and extraction of negative ions from produced plasmas

Authors

  • Motoi Wada ⋅ JP Graduate School of Engineering, Doshisha University
  • Toshiro Kasuya ⋅ JP Graduate School of Engineering, Doshisha University
  • Shuichi Kato ⋅ JP Graduate School of Engineering, Doshisha University
  • Takahiro Kenmotsu ⋅ JP Faculty of Life and Medical Sciences, Doshisha University
  • Shuichi Maeno ⋅ JP Novelion Systems Co., Ltd., Kyoto
  • Naoki Miyamoto ⋅ JP Graduate School of Engineering, Doshisha University
  • Masaki Nishiura ⋅ JP National Institute for Fusion Science, Gifu
  • Mamiko Sasao ⋅ JP Organization for Research Initiative & Development, Doshisha University
  • Magdaleno R. Vasquez, Jr. ⋅ PH Graduate School Engineering, Doshisha University
  • Hitoshi Yamaoka ⋅ JP RIKEN, Harima Institute

Abstract

Methods to excite plasmas utilizing alternating current (AC) electrical power in radio frequency (RF) range coupled to static magnetic field have been reviewed, and their applications to negative ion sources are discussed. Comparisons on merits and demerits among different frequencies in plasma excitation are made for surface and volume negative ion production processes along with the analyses on improving overall performance as a plasma of a negative ion source. Matching schemes of AC powers to plasma production and heating are emphasized.

Downloads

Issue

Article ID

SPP2012-5B-1

Section

Plasma Physics

Published

2012-10-22

How to Cite

[1]
M Wada, T Kasuya, S Kato, T Kenmotsu, S Maeno, N Miyamoto, M Nishiura, M Sasao, MR Vasquez, and H Yamaoka, Plasma excitation by RF power and extraction of negative ions from produced plasmas, Proceedings of the Samahang Pisika ng Pilipinas 30, SPP2012-5B-1 (2012). URL: https://proceedings.spp-online.org/article/view/SPP2012-5B-1.