Plasma excitation by RF power and extraction of negative ions from produced plasmas

Abstract

Methods to excite plasmas utilizing alternating current (AC) electrical power in radio frequency (RF) range coupled to static magnetic field have been reviewed, and their applications to negative ion sources are discussed. Comparisons on merits and demerits among different frequencies in plasma excitation are made for surface and volume negative ion production processes along with the analyses on improving overall performance as a plasma of a negative ion source. Matching schemes of AC powers to plasma production and heating are emphasized.