Surface modification of polymethylmethacrylate (PMMA) by argon plasma treatment
Abstract
In this study, we present the effects of argon plasma treatment on the surface of polymethylmethacrylate (PPMA). The effect of the adhesion of a Copper film on the plasma-treated surface is also reported. The argon plasma was created in a reconfigured high vacuum system with a dc glow discharge at 1500 discharge voltage and 6mA discharge current. The argon pressure was 1.8x10-2 mmHg. The PMMA sample was exposed to argon plasma for ten minutes. The surface modification of PMMA after plasma treatment were monitored using AFM, FTIR,XPS and for the adhesion effect of PMMA to Cu layer adhesion measurement using a pull-out force sensor was used. AFM images show that the surface was cleaned and etched by active argon species. FTIR analysis indicated increase in the hydrocarbons groups and decrease in C=O and C-O bonds. .Moreover, Cu layer on treated PMMA exhibited higher adhesion strength as compared to Cu layer on untreated PMMA.