Fabrication of low reflectance porous silicon with gradient
Abstract
Low reflectance porous silicon layers were fabricated using electrochemical etching in an ethanol-hydrofluoric acid solution at different time intervals and different anodic current densities. Layers with varying refractive indices were produced as the current density is changed during the etching process. The samples were characterized via Scanning Electron Microscope (SEM) and Optical Reflectivity. Minimum reflectivity of each sample was obtained from their corresponding reflectance spectra.