Fabrication and characterization of free-standing porous silicon
Abstract
Free-standing porous silicon (FS PSi) layers were fabricated from 2x2cm2 p-type silicon (100) wafers through electrochemical etching in ethanol-hydrofluoric acid solution. Currents of 15mA, 40mA and 120mA were used for anodization for 100 minutes. An abrupt increase to 250mA after the time interval showed successful liftoff of porous silicon from the silicon substrate creating FS PSi. Transmission spectra of free-standing samples showed a maximum of 40% transmission. Reflection spectra of non free-standing counter parts had 2.5% and 10% reflection for 40mA and 120mA respectively.