TiO2 nanotube layers doped with Ag nanoparticles used as formaldehyde emission sensor
Abstract
Formaldehyde gas sensor using TiO2 doped with Ag nanoparticle was fabricated by anodizing Ti film sputtered on a silicon substrate. Ag nanoparticles were loaded on the TiO2 nanotubes via UV decomposition. The TiO2 nanotubes has an average diameter of 192.25nm and tube length of 882.69nm. The pores average diameter was 55.55nm, 78.71nm, 92.11nm, and 75.27nm for the control, 30min UV, 60min UV, and 120min UV exposure time respectively. The number of pores increased from 62.00 to a maximum of 119.67 for 60min UV exposure time. TiO2-Ag film exhibit a 53.12% sensitivity at room temperature.