Temperature profiles of quartz discharge tubes containing microwave plasma jets of argon
Abstract
The temperature profiles of a dielectric discharge tube containing microwave plasma jets of argon are reported. The discharge tube is made of fused quartz glass with a diameter of 2 cm. The temperature profile of the discharge tube is studied in terms of the heating duration, gas flow rate, microwave power, and discharge tube length. Results show that there is uneven heating of the different regions of the quartz tube. The location of the hottest region of the discharge tube differs for various gas flow rate and microwave power. It is also found that the temperature of the discharge tube reaches thermal equilibrium within 5 minutes of heating.
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