X-Ray diffraction study of AlxGa1-xAs/GaAs bilayer superlattice

Abstract

Al_xGa_1-xAs/GaAs superlattice was characterized using x-ray diffraction. The periodicity and Al composition was obtained from the diffraction pattern of the superlattice. Kinematical model of x-ray diffraction was used to simulate the diffraction profile using the parameters obtained from the experiment. Good agreements were seen from the satellite peaks of the experimental and simulated diffraction pattern. Furthermore, periodicity fluctuation of layer thickness was observed to cause the broadness of the width of the satellite peaks in the x-ray diffraction pattern. The full width half maximum (FWHM) of each satellite peaks was obtained.