Monitoring the Presence of Cu2O and CuO during thermal oxidation of copper thin film via In Situ measurement of transmittance
Abstract
The formation of Cu2O and CuO from thermally oxidizing a copper thin film deposited on a glass substrate is monitored by looking at the transmittance when a 633 nm laser light is incident on the copper thin film during oxidation. Transmittance increases initially and then plateaus for samples oxidized at a maximum temperature of 204°C, indicating the formation of Cu2O. Transmittance increases initially and then gradually declines for samples oxidized at a maximum temperature of 378°C, indicating the formation of CuO. The films have been characterized using SEM, EDX, and UV/Vis analysis.